The MOCON - Baseline Series 9100 Gas Chromatograph equipped with a photoionization detector (PID) provides a quick, cost-effective quantitative analysis of IPA and acetone in air at levels in the ppb and sub-ppb range with no preconcentration necessary. Competitive analytical approaches that require preconcentration exhibit much longer analysis times, are much more costly, are more complex, and suffer from poor reproducibility.

Isopropanol and acetone are detected and accurately quantified to sub-ppb levels in under 3 minutes with ethanol producing no interference. The instrument is sensitive to below 5 ppb for both IPA and acetone employing MOCON - Baseline’s standard PID, and < 0.1 ppb using MOCON - Baseline’s high sensitivity PID.
Unit of Measure

Applications

N/A During semiconductor fabrication processes, volatile organic compounds (VOCs) are emitted primarily from diffusion, and cleaning during wet-etching processes. The most common organic solvents used in semiconductor cleanroom environments, i.e., solvent stations, are isopropanol, and acetone. Residual presence of these solvents can be detrimental to both production yields and to worker health.

Features

N/A

  • Direct measurement of Ethanol, IPA, and acetone
  • Interference free response
  • Automatic calibration for unattended operation
  • Automatic baseline adjustment for long-term stability
  • Analog output ranges are user selectable
  • Multipoint sampling options
  • RS-232 and optional LAN

  • Specifications

    Analysis Time

    N/A < 180 seconds

    Detector

    N/A Photoionization (PID), standard or high-sensitivity

    Oven Temperature

    N/A 50 °C, isothermal

    Carrier Gas

    N/A Grade 5 Nitrogen (N2); (< 1 ppm hydrocarbons)

    Lower Detection Limit

    N/A IPA (std PID): < 5 ppb; < 0.1 ppb (HS-PID) / Acetone: < 5 ppb (std PID); < 0.1 ppb (HS-PID)

    Output

    N/A Standard: Digital—RS-232, LAN; Optional: I/O Board: 5 programmable (latched/not, NE/NNE) relays as contact closure (3 A at 250 V DC); 1 analog output, 6 digital inputs.
    Additional expansion boards available: Relays: available in multiples of 8 up to 16

    Relays

    N/A Optional— I/O Board: (5) programmable (latched/not, NE, NNE) relays as contact closure (3 A at 250 V DC); (1)analog output, 6 digital inputs
    Additional expansion boards:
    Relays: available in multiples of (8) up to 916)
    Analog: available in (4)

    Inputs

    N/A Optional: Digital input board for six contact closure inputs. Supports start sequence (8 each), start sequence loop (8 each), open method (8 each), and diagnostic functions.

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