Isopropanol and acetone are detected and accurately quantified to sub-ppb levels in under 3 minutes with ethanol producing no interference. The instrument is sensitive to below 5 ppb for both IPA and acetone employing MOCON - Baseline’s standard PID, and < 0.1 ppb using MOCON - Baseline’s high sensitivity PID.
Applications
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N/A During semiconductor fabrication processes, volatile organic compounds (VOCs) are emitted primarily from diffusion, and cleaning during wet-etching processes. The most common organic solvents used in semiconductor cleanroom environments, i.e., solvent stations, are isopropanol, and acetone. Residual presence of these solvents can be detrimental to both production yields and to worker health. |
Features
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N/A
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Specifications
Analysis Time |
N/A < 180 seconds |
Detector |
N/A Photoionization (PID), standard or high-sensitivity |
Oven Temperature |
N/A 50 °C, isothermal |
Carrier Gas |
N/A Grade 5 Nitrogen (N2); (< 1 ppm hydrocarbons) |
Lower Detection Limit |
N/A IPA (std PID): < 5 ppb; < 0.1 ppb (HS-PID) / Acetone: < 5 ppb (std PID); < 0.1 ppb (HS-PID) |
Output |
N/A
Standard: Digital—RS-232, LAN; Optional: I/O Board: 5 programmable (latched/not, NE/NNE) relays as contact closure (3 A at 250 V DC); 1 analog output, 6 digital inputs. Additional expansion boards available: Relays: available in multiples of 8 up to 16 |
Relays |
N/A Optional— I/O Board: (5) programmable (latched/not, NE, NNE) relays as contact closure (3 A at 250 V DC); (1)analog output, 6 digital inputsAdditional expansion boards:Relays: available in multiples of (8) up to 916)Analog: available in (4) |
Inputs |
N/A Optional: Digital input board for six contact closure inputs. Supports start sequence (8 each), start sequence loop (8 each), open method (8 each), and diagnostic functions. |
